| Single-Spot Measurements |
Model | Thickness Range |
Wavelength Range | Standard Spot Size | |
|---|---|---|---|---|---|
F3 | Reflectance and film-thickness measurements Features: Compact, low-cost, non-UV systems have 40k-hour light source. * Thickness measurement capability is optional. | ||||
|
F3 | 0.015-70 µm * | 380-1050 nm | 100 μm | |
| F3-NIR | 0.1-250 µm * | 950-1700 nm | 100 μm | ||
| F3-UV | 0.003-40 µm * | 190-1100 nm | 100 μm | ||
| F3-XT | 0.2-450 µm * | 1440-1690 nm | 100 μm | ||
F3-CP | Reflectance measurement of flat or curved samples Features: Compact, low-cost, non-UV systems have 40k-hour light source. * Thickness measurement capability is optional. | ||||
|
F3-CP | 0.015-70 µm * | 380-1050 nm | 100 μm | |
F3-CS | Hands-free reflectance measurement of flat samples Features: Compact, hands-free. * Thickness measurement capability is optional. | ||||
|
F3-CS | 0.015-70 µm * | 380-1050 nm | 100 μm | |
F10-AR | Reflectance measurement of large flat or curved samples Features: Handheld probe for large samples and maximum versatility. * Thickness measurement capability is optional. | ||||
|
F10-AR-EXR | 0.2-30 µm * | 380-1700 nm | 100 μm | |
| F10-AR-NIR | 0.5-30 µm * | 950-1700 nm | 100 μm | ||
| F10-AR-UV | 0.1-15 µm * | 190-1100 nm | 100 μm | ||
| F10-AR-UVX | 0.1-30 µm * | 190-1700 nm | 100 μm | ||
F10-ARc | Reflectance measurement of AR coatings Features: Includes color and reflectance alarms and hardcoat correction. * Thickness measurement capability is optional. | ||||
|
F10-ARc | 0.2-15 µm * | 380-1050 nm | 100 μm | |
F10-HC | Reflectance measurement of AR coatings Features: Handheld probe for large samples and maximum versatility. * Thickness measurement | ||||
|
F10-HC | 0.05-70 µm * | 380-1050 nm | 200 μm | |
| In-line Measurements |
Model | Thickness Range |
Wavelength Range | Standard Spot Size | |
|---|---|---|---|---|---|
F30 | Complete in-line thickness monitor Features: Optional high-speed photodiode detectors. | ||||
|
F30 | 0.015-70 µm | 380-1050 nm | 1500 μm | |
| F30-EXR | 0.015-250 µm | 380-1700 nm | 1500 μm | ||
| F30-NIR | 0.1-250 µm | 950-1700 nm | 1500 μm | ||
| F30-UV | 0.003-40 µm | 190-1100 nm | 1500 μm | ||
| F30-UVX | 0.003-250 µm | 190-1700 nm | 1500 μm | ||
| F30-XT | 0.2-450 µm | 1440-1690 nm | 1500 μm | ||
F32 | Compact solution for in-line measurements Features: Includes spectrometer(s), software, and 10k-hour light source. | ||||
|
F32 | 0.015-70 µm | 380-1050 nm | 1500 μm | |
| F32-EXR | 0.015-250 µm | 380-1700 nm | 1500 μm | ||
| F32-NIR | 0.1-250 µm | 950-1700 nm | 1500 μm | ||
| F32-UV | 0.003-40 µm | 190-1100 nm | 1500 μm | ||
| F32-UVX | 0.003-250 µm | 190-1700 nm | 1500 μm | ||
| F32-XT | 0.2-450 µm | 1440-1690 nm | 1500 μm | ||
| F32-s980 | 10-1000 µm * | 960-1000 nm | 10 μm | ||
| F32-s1310 | 15-2000 µm * | 1280-1340 nm | 10 μm | ||
| F32-s1550 | 25-3000 µm * | 1520-1580 nm | 10 μm | ||
| Multi-Point Mapping | Model | Thickness Range |
Wavelength Range | Standard Spot Size | |
|---|---|---|---|---|---|
F50 | Measures thickness etc. at two points/second Features: Sample chucks (up to 300mm) sold separately. | ||||
|
F50 | 0.02-70 µm | 380-1050 nm | 1500 μm | |
| F50-EXR | 0.02-250 µm | 380-1700 nm | 1500 μm | ||
| F50-NIR | 0.1-250 µm | 950-1700 nm | 1500 μm | ||
| F50-UV | 0.005-40 µm | 190-1100 nm | 1500 μm | ||
| F50-UVX | 0.005-250 µm | 190-1700 nm | 1500 μm | ||
| F50-XT | 0.2-450 µm | 1440-1690 nm | 1500 μm | ||
| F50-s980 | 4-1000 µm | 960-1000 nm | 10 μm | ||
| F50-s1310 | 7-2000 µm | 1280-1340 nm | 10 μm | ||
| F50-s1550 | 10-3000 µm | 1520-1580 nm | 10 μm | ||
F50-450 | Measures thickness on 450mm wafers Features: Sample chucks (up to 450mm) sold separately. | ||||
|
|
F50-450 | 0.02-70 µm | 380-1050 nm | 1500 μm | |
| F50-450-EXR | 0.02-250 µm | 380-1700 nm | 1500 μm | ||
| F50-450-NIR | 0.1-250 µm | 950-1700 nm | 1500 μm | ||
| F50-450-UV | 0.005-40 µm | 190-1100 nm | 1500 μm | ||
| F50-450-UVX | 0.005-250 µm | 190-1700 nm | 1500 μm | ||
F50-XY | Measures thickness on large panels Features: LCD panels are a common application. | ||||
|
F50-XY | 0.02-100 µm | 380-1050 nm | 1500 μm | |
| F50-XY-EXR | 0.02-250 µm | 380-1700 nm | 1500 μm | ||
| F50-XY-NIR | 0.1-250 µm | 950-1700 nm | 1500 μm | ||
| F50-XY-UV | 0.005-40 µm | 190-1100 nm | 1500 μm | ||
| F50-XY-UVX | 0.005-250 µm | 190-1700 nm | 1500 μm | ||
| F50-XY-XT | 0.2-450 µm | 1440-1690 nm | 1500 μm | ||
F54 | Automated film thickness mapping Features: Sample chucks (up to 450mm) sold separately. | ||||
|
F54 | 0.02-40 µm | 400-850 nm | 7 μm | |
| F54-EXR | 0.02-100 µm | 400-1700 nm | 7 μm | ||
| F54-NIR | 0.04-100 µm | 950-1700 nm | 7 μm | ||
| F54-UV | 0.004-30 µm | 190-1100 nm | 7 μm | ||
| F54-UVX | 0.004-100 µm | 190-1700 nm | 7 μm | ||
F60-t | Production-oriented film thickness mapping Features: Includes notch-finding, on-board baselining, and safety interlock. | ||||
|
F60-t | 0.02-70 µm | 380-1050 nm | 1500 μm | |
| F60-t-EXR | 0.02-250 µm | 380-1700 nm | 1500 μm | ||
| F60-t-NIR | 0.1-250 µm | 950-1700 nm | 1500 μm | ||
| F60-t-UV | 0.005-40 µm | 190-1100 nm | 1500 μm | ||
| F60-t-UVX | 0.005-250 µm | 190-1700 nm | 1500 μm | ||
| F60-t-XT | 0.2-450 µm | 1440-1690 nm | 1500 μm | ||
| F60-t-s980 | 4-1000 µm | 960-1000 nm | 10 μm | ||
| F60-t-s1310 | 7-2000 µm | 1280-1340 nm | 10 μm | ||
| F60-t-s1550 | 10-3000 µm | 1520-1580 nm | 10 μm | ||