| Optical Profilers | Model | Thickness Range |
Field-of-View | Spatial Sampling | |
|---|---|---|---|---|---|
Profilm3D | Step-height and surface roughness measurements Features: VIS and PSI measurement capabilities. 100mm of motorized X, Y, and Z translation. Tip/Tilt Stage. * With 10X objective lens. | ||||
|
Profilm3D | 0.001-500 µm | 2.0 x 1.7 mm * | 0.88 µm * | |
| Single-Spot Measurements |
Model | Thickness Range |
Wavelength Range | Standard Spot Size | |
|---|---|---|---|---|---|
F3 | Reflectance and film-thickness measurements Features: Compact, low-cost, non-UV systems have 40k-hour light source. * Thickness measurement capability is optional. | ||||
|
F3-UV | 0.003-40 µm * | 190-1100 nm | 100 μm | |
| Single-Spot Measurements |
Model | Thickness Range |
Wavelength Range | Standard Spot Size | |
|---|---|---|---|---|---|
F10-RT | Reflectance and/or transmittance measurement Features: Simultaneous measurement of R and T. Built-in video. * Thickness measurement capability is optional. | ||||
|
F10-RT-UV | 0.003-40 µm * | 190-1100 nm | 5000 μm | |
| F10-RT-UVX | 0.003-150 µm * | 190-1700 nm | 5000 μm | ||
F20 | The world's best-selling thin-film measurement system Features: Our most versatile model. Includes full thickness and index measurement capabilities. | ||||
|
F20-UV | 0.003-40 µm | 190-1100 nm | 1500 μm | |
| F20-UVX | 0.003-250 µm | 190-1700 nm | 1500 μm | ||
F40 | Microscope-based thin-film measurement system Features: Attach to a microscope. Very small spot size. | ||||
|
F40-UV | 0.004-40 µm | 190-1100 nm | 7 μm | |
| F40-UVX | 0.004-40 µm | 190-1700 nm | 7 μm | ||
| In-line Measurements |
Model | Thickness Range |
Wavelength Range | Standard Spot Size | |
|---|---|---|---|---|---|
F30 | Complete in-line thickness monitor Features: Optional high-speed photodiode detectors. | ||||
|
F30-UV | 0.003-40 µm | 190-1100 nm | 1500 μm | |
| F30-UVX | 0.003-250 µm | 190-1700 nm | 1500 μm | ||
F32 | Compact solution for in-line measurements Features: Includes spectrometer(s), software, and 10k-hour light source. | ||||
|
F32-UV | 0.003-40 µm | 190-1100 nm | 1500 μm | |
| F32-UVX | 0.003-250 µm | 190-1700 nm | 1500 μm | ||
| Multi-Point Mapping | Model | Thickness Range |
Wavelength Range | Standard Spot Size | |
|---|---|---|---|---|---|
F50 | Measures thickness etc. at two points/second Features: Sample chucks (up to 300mm) sold separately. | ||||
|
F50-UV | 0.005-40 µm | 190-1100 nm | 1500 μm | |
| F50-UVX | 0.005-250 µm | 190-1700 nm | 1500 μm | ||
F50-450 | Measures thickness on 450mm wafers Features: Sample chucks (up to 450mm) sold separately. | ||||
|
|
F50-450-UV | 0.005-40 µm | 190-1100 nm | 1500 μm | |
| F50-450-UVX | 0.005-250 µm | 190-1700 nm | 1500 μm | ||
F50-XY | Measures thickness on large panels Features: LCD panels are a common application. | ||||
|
F50-XY-UV | 0.005-40 µm | 190-1100 nm | 1500 μm | |
| F50-XY-UVX | 0.005-250 µm | 190-1700 nm | 1500 μm | ||
F54 | Automated film thickness mapping Features: Sample chucks (up to 450mm) sold separately. | ||||
|
F54-UV | 0.004-30 µm | 190-1100 nm | 7 μm | |
| F54-UVX | 0.004-100 µm | 190-1700 nm | 7 μm | ||
F60-t | Production-oriented film thickness mapping Features: Includes notch-finding, on-board baselining, and safety interlock. | ||||
|
F60-t-UV | 0.005-40 µm | 190-1100 nm | 1500 μm | |
| F60-t-UVX | 0.005-250 µm | 190-1700 nm | 1500 μm | ||